Gas Analysis Total Solution
The types of special gases used in the semiconductor industry process are becoming more diversified, and their purity and impure content will directly or indirectly affect the quality and yield of the process.
With the rapid development of advanced manufacturing processes, the types of special gases used in semiconductor manufacturing, photovoltaic panel manufacturing, and solar industry manufacturing processes have become more diversified (such as NH3, NF3, N2O, CO2, CF4, etc.). The purity and impurity content of these special gases used will directly or indirectly affect the quality and yield of the process. SGS provides complete special gas analysis and testing services, and strictly controls the process special gases used by customers.
Special gas detection service content
- Analysis of moisture concentration in gas
- Analysis of trace metal elements and ion content in gas
- Analysis of total hydrocarbon content in gas
- Analysis of other impurities in gas
- Concentration analysis in mixed gas